Diamond Tools and cBN Tools

Grinding tools

CMP Conditioner

CMP Conditioner capable of retaining stable conditioning performance for long hours.

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CMP Conditioner

Features

An optimized abrasive grain layer structure that follows elastic deformation of a pad makes abrasives work efficiently and provides longer life.

Application

Conditioning of polishing pads used for flattening (CMP) of metallic films and insulating films in the semiconductor LSI process.

Concept of CMP conditioning

Technical Data
Concept showing features of New Type

Concept showing features of New Type

Long life realized by New Type.

Long life realized by New Type.

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