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A.L.M.T. Corp.

Wheel for silicon wafer rough grinding
「Nanomate V-Heart」

Wheel for silicon wafer rough grinding </br>「Nanomate V-Heart」
Wheel for silicon wafer rough grinding </br>「Nanomate V-Heart」
Wheel for silicon wafer rough grinding </br>「Nanomate V-Heart」
Wheel for silicon wafer rough grinding </br>「Nanomate V-Heart」

Demonstrates excellence in the primary grinding of as deposition and as-sliced wafers

A vitrified bond wheel having high grain holding power. The high porosity structure and the characteristic grain layer shape realize low grinding resistance and create a new grinding region.
"Nanomate" capable of creating a flatness below 1 μm with Φ300-mm silicon wafers enables grinding of brittle materials used for semiconductor and electronic parts that have been difficult to grind with conventional wheels.

Characteristics

  • The grinding resistance is about one tenth of the resin bond wheel. Fine abrasive grains, yet high efficiency and low-load grinding is realized. The V-shape that allows the setting of optimum grain spacing ensures long-lasting sharpness.

Applications

Primary grinding of as deposition and as-sliced wafers, etc.

Industries

  • Semiconductor/electronics

Work Material

  • Semiconductor material

Processing Method

  • Surface grinding, double-ended surface grinding

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