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A.L.M.T. Corp.

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Wheel for silicon wafer finishing </br>「Nanomate Premium」

This wheel demonstrates excellence in reducing damaged layers and strain layers during grinding of brittle materials such as reducing polishing of 300-mm silicon wafers and minimizing cracking of thin device wafers.

ApplicationsUltra-precision surface grinding of various semiconductor wafers
Wheel for SiC wafer finishing </br>"Nanomate Premium"

Continuous grinding of single crystal SiC wafers that are difficult to grind with other wheels is now possible. Grinding can be performed at the same feed rate as for Si wafers and ultra-smooth surfaces can be produced.

ApplicationsUltra-precision surface grinding of various semiconductor wafers
Wheel for LT/LN wafer grinding </br>"Nanomate Premium"

Brittle LT wafers used for SAW filters can be ground with low damage and high quality.

ApplicationsPrecision surface grinding of LT wafers
Wheel for GaN wafer grinding </br>"Nanomate Premium"

The adjustment of the binding grade and bond has enabled grinding of difficult-to-cut materials with fine grains that have been difficult to grind with conventional wheels.

ApplicationsPrecision surface grinding of GaN wafers
Wheel for sapphire wafer grinding </br>"Nanomate Premium"

ApplicationsPrecision surface grinding of Sapphire wafers
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