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This wheel demonstrates excellence in reducing damaged layers and strain layers during grinding of brittle materials such as reducing polishing of 300-mm silicon wafers and minimizing cracking of thin device wafers.
Applications | Ultra-precision surface grinding of various semiconductor wafers |
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Continuous grinding of single crystal SiC wafers that are difficult to grind with other wheels is now possible. Grinding can be performed at the same feed rate as for Si wafers and ultra-smooth surfaces can be produced.
Applications | Ultra-precision surface grinding of various semiconductor wafers |
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Brittle LT wafers used for SAW filters can be ground with low damage and high quality.
Applications | Precision surface grinding of LT wafers |
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The adjustment of the binding grade and bond has enabled grinding of difficult-to-cut materials with fine grains that have been difficult to grind with conventional wheels.
Applications | Precision surface grinding of GaN wafers |
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Applications | Precision surface grinding of Sapphire wafers |
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